Multiphysics modeling approach for micro electro–thermo–mechanical actuator: Failure mechanisms coupled analysis
نویسندگان
چکیده
منابع مشابه
Multiphysics modeling approach for micro electro-thermo-mechanical actuator: Failure mechanisms coupled analysis
The lifetime of micro electro–thermo–mechanical actuators with complex electro–thermo–mechanical coupling mechanisms can be decreased significantly due to unexpected failure events. Even more serious is the fact that various failures are tightly coupled due to micro-size and multi-physics effects. Interrelation between performance and potential failures should be established to predict reliabil...
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ژورنال
عنوان ژورنال: Microelectronics Reliability
سال: 2015
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2015.02.012